Effects of Chamber Pressure on Current-Voltage Characteristic of Metal-Insulator-Metal Element in Heat-Treating Anodized Ta2O5 Film
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Abstract
Ta/anodized Ta2O5/Al is used as metal-insulator-metal (MIM) element in experiments, The current- voltage (I- V) characteristic of the MIM element depends on the chamber pressure in heat-treating anodized Ta2O5 film. Good nonlinear I- V characteristic has been obtained in the pressure range from 10-2 to 10-4 to Torr. Meanwhile, the conductivity coefficient α of the Poole-frenkel (PF) equation which describes the I- V characteristic can be regulated by about two orders of magnitude in this pressure range, while the non-linearity coefficient β of the PF equation is not affected by the chamber pressure.
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References
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