Nano-opto-electro-mechanical systems from moiré superlattices

Emerging electronic, photonic, and mechanical properties exhibited by moiré superlattices formed through stacked twisted interfaces may revolutionize nano-opto-electro-mechanical systems, yet their impacts remain elusive. Here, we propose and demonstrate a multifunctional nano-opto-electro-mechanical system based on low-tension suspended twisted bilayer graphene. The mechanical properties of this system resemble those of other two-dimensional materials, exhibiting uniform membrane-like structures. Its tunable cavity length spans a broad range, with optical spectral signals significantly enhanced by approximately 8-fold when the length varies by about 50 nanometers. We further demonstrate that the microscopic degrees of freedom in twisted bilayer graphene can be effectively controlled through unique static and dynamic strain mechanisms. This work holds promise for unprecedented manipulation of electrons, photons, and phonons, and advances the development of hybrid quantum devices.