Direct Generation of an Array with 78400 Optical Tweezers Using a Single Metasurface

Scalability remains a major challenge in building practical fault-tolerant quantum computers. Currently, the largest number of qubits achieved across leading quantum platforms ranges from hundreds to thousands. In atom arrays, scalability is primarily constrained by the capacity to generate large numbers of optical tweezers, and conventional techniques using acousto-optic deflectors or spatial light modulators struggle to produce arrays much beyond ∼ 10, 000 tweezers. Moreover, these methods require additional microscope objectives to focus the light into micrometer-sized spots, which further complicates system integration and scalability. Here, we demonstrate the experimental generation of an optical tweezer array containing 280 × 280 spots using a metasurface, nearly an order of magnitude more than most existing systems. The metasurface leverages a large number of subwavelength phase-control pixels to engineer the wavefront of the incident light, enabling both large-scale tweezer generation and direct focusing into micron-scale spots without the need for a microscope. This result shifts the scalability bottleneck for atom arrays from the tweezer generation hardware to the available laser power. Furthermore, the array shows excellent intensity uniformity exceeding 90%, making it suitable for homogeneous single-atom loading and paving the way for trapping arrays of more than 10, 000 atoms in the near future.