Electrically Tunable Wafer-Sized Three-Dimensional Topological Insulator Thin Films Grown by Magnetron Sputtering
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Qixun Guo,
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Yu Wu,
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Longxiang Xu,
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Yan Gong,
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Yunbo Ou,
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Yang Liu,
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Leilei Li,
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Yu Yan,
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Gang Han,
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Dongwei Wang,
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Lihua Wang,
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Shibing Long,
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Bowei Zhang,
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Xun Cao,
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Shanwu Yang,
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Xuemin Wang,
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Yizhong Huang,
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Tao Liu,
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Guanghua Yu,
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Ke He,
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Jiao Teng
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Abstract
Three-dimensional (3D) topological insulators (TIs) are candidate materials for various electronic and spintronic devices due to their strong spin-orbit coupling and unique surface electronic structure. Rapid, low-cost preparation of large-area TI thin films compatible with conventional semiconductor technology is the key to the practical applications of TIs. Here we show that wafer-sized Bi_2Te_3 family TI and magnetic TI films with decent quality and well-controlled composition and properties can be prepared on amorphous SiO_2/Si substrates by magnetron cosputtering. The SiO_2/Si substrates enable us to electrically tune (Bi_1-xSb_x)_2Te_3 and Cr-doped (Bi_1-xSb_x)_2Te_3 TI films between p-type and n-type behavior and thus study the phenomena associated with topological surface states, such as the quantum anomalous Hall effect (QAHE). This work significantly facilitates the fabrication of TI-based devices for electronic and spintronic applications.
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Cite this article:
Qixun Guo, Yu Wu, Longxiang Xu, Yan Gong, Yunbo Ou, Yang Liu, Leilei Li, Yu Yan, Gang Han, Dongwei Wang, Lihua Wang, Shibing Long, Bowei Zhang, Xun Cao, Shanwu Yang, Xuemin Wang, Yizhong Huang, Tao Liu, Guanghua Yu, Ke He, Jiao Teng. Electrically Tunable Wafer-Sized Three-Dimensional Topological Insulator Thin Films Grown by Magnetron Sputtering[J].
Chin. Phys. Lett., 2020, 37(5): 057301.
DOI: 10.1088/0256-307X/37/5/057301
Qixun Guo, Yu Wu, Longxiang Xu, Yan Gong, Yunbo Ou, Yang Liu, Leilei Li, Yu Yan, Gang Han, Dongwei Wang, Lihua Wang, Shibing Long, Bowei Zhang, Xun Cao, Shanwu Yang, Xuemin Wang, Yizhong Huang, Tao Liu, Guanghua Yu, Ke He, Jiao Teng. Electrically Tunable Wafer-Sized Three-Dimensional Topological Insulator Thin Films Grown by Magnetron Sputtering[J]. Chin. Phys. Lett., 2020, 37(5): 057301. DOI: 10.1088/0256-307X/37/5/057301
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Qixun Guo, Yu Wu, Longxiang Xu, Yan Gong, Yunbo Ou, Yang Liu, Leilei Li, Yu Yan, Gang Han, Dongwei Wang, Lihua Wang, Shibing Long, Bowei Zhang, Xun Cao, Shanwu Yang, Xuemin Wang, Yizhong Huang, Tao Liu, Guanghua Yu, Ke He, Jiao Teng. Electrically Tunable Wafer-Sized Three-Dimensional Topological Insulator Thin Films Grown by Magnetron Sputtering[J]. Chin. Phys. Lett., 2020, 37(5): 057301. DOI: 10.1088/0256-307X/37/5/057301
Qixun Guo, Yu Wu, Longxiang Xu, Yan Gong, Yunbo Ou, Yang Liu, Leilei Li, Yu Yan, Gang Han, Dongwei Wang, Lihua Wang, Shibing Long, Bowei Zhang, Xun Cao, Shanwu Yang, Xuemin Wang, Yizhong Huang, Tao Liu, Guanghua Yu, Ke He, Jiao Teng. Electrically Tunable Wafer-Sized Three-Dimensional Topological Insulator Thin Films Grown by Magnetron Sputtering[J]. Chin. Phys. Lett., 2020, 37(5): 057301. DOI: 10.1088/0256-307X/37/5/057301
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