Polarization-Stable 980 nm Vertical-Cavity Surface-Emitting Lasers with Diamond-Shaped Oxide Aperture

Polarization-stable 980 nm oxide-confined vertical-cavity surface-emitting lasers with 3 m diamond-shaped aperture are fabricated by comprehensively utilizing the anisotropic properties of wet etching and wet nitrogen oxidation of III–V semiconductor materials. Polarization-stable operation along the major axis of the diamond-shaped oxide aperture with 11 dB orthogonal polarization suppression ratio is achieved in a temperature range of 15–55°C from the threshold to 4 mA.