Phase Shift of Polarized Light after Transmission through a Biaxial Anisotropic Thin Film

Based on the theoretical analysis of biaxial birefringent thin films with characteristic matrix method, we investigate the phase shift on transmission of a tilted columnar biaxial film at normal and oblique incidence over 300–1200 nm for s- and p-polarized waves. Compared with the simplified calculation method, the interference effects of the birefringent thin film are considered to yield more accurate results. The quarter wavelength phase shift calculated with the characteristic matrix method is consistent with that monitored with in situ measurement by two-angle ellipsometry, which validates our complied program for the calculation of the phase shift of the biaxial anisotropic thin film. Furthermore, the characteristic matrix method can be easily used to obtain continuous adjustable phase retardation at oblique incidence, whereas the simplified calculation method is valid for the case of normal incidence. A greater generality and superiority of the characteristic matrix method is presented.