Leakage Current Simulation of Insulating Thin Film Irradiated by a Nonpenetrating Electron Beam
-
Abstract
We perform numerical simulations of the leakage current characteristics of an insulating thin film of SiO2 negatively charged by a low-energy nonpenetrating focused electron beam. For the formation of leakage current, electrons are demonstrated to turn from diffusion to drift after clearing the minimum potential barrier due to electron-hole separation. In the equilibrium state, the leakage current increases approximately linearly with the increasing primary beam current and energy. It also increases with the increasing film thickness and trap density, and with the decreasing electron mobility, in which the film thickness has a greater influence. Validated by some existing experiments, the simulation results provide a new perspective for the negative charging effects of insulating samples due to the low-energy focused electron beam. -
References
[1] Cazaux J, Kim K H, Jbara O and Salace G 1991 J. Appl. Phys. 70 960 [2] Mizuhara Y, Kato J, Nagatomi T, Takai Y and Inoue M 2002 J. Appl. Phys. 92 6128 [3] Li W Q and Zhang H B 2008 Acta Phys. Sin. 57 3219 (in Chinese) [4] Cornet N, Goeuriot D, Touzin M, Guerret Piecourt C, Juve D, Treheux D and Fitting H J 2009 J. Non-Cryst. Solids 355 1111 [5] Fakhfakh S, Jbara O, Rondot S, Hadjadj A, Patat J M and Fakhfakh Z 2010 J. Appl. Phys. 108 093705 [6] Hwu J J and Joy D C 1999 Scanning 21 264 [7] Nakasugi T, Ando A, Sugihara K, Miyoshi M and Okumura K 2001 Proc. SPIE 4343 334 [8] Bai M, Pease R F W and Meisburger D 2003 J. Vac. Sci. Technol. B 21 2638 [9] Zhang H B, Li W Q and Wu D W 2009 J. Electron Microsc. 58 15 [10] Mott N F and Gurney R W 1940 Electronic Processes in Ionic Crystals (Oxford: Clarendon) [11] Nunes de Oliveira L and Gross B 1975 J. Appl. Phys. 46 3132 [12] Aris F C, Davies P M and Lewis T J 1976 J. Phys. C: Solid State Phys. 9 797 [13] Taylor D M 1981 IEE Proc. A 128 174 [14] Neumann F, Genenko Y A, Schmechel R and von Seggern H 2005 Synth. Met. 150 291 [15] Chandra W, Ang L K, Pey K L and Ng C M 2007 Appl. Phys. Lett. 90 153505 [16] Kurniawan O and Ong V K S 2009 IEEE Trans. Electron Devices 56 1094 [17] Li W Q and Zhang H B 2010 Micron 41 416 [18] Jiang D J and Tan Z Y 2010 Chin. Phys. Lett. 27 033401 [19] Li W Q and Zhang H B 2010 Appl. Surf. Sci. 256 3482 [20] Joy D C 1995 Monte Carlo Modeling for Electron Microscopy and Microanalysis (New York: Oxford University Press) [21] Zhang H B, Feng R J and Ura K 2003 Chin. Phys. Lett. 20 2011 [22] Zhang H B, Li W Q and Cao M 2012 J. Electron Microsc. [23] Chen F F 1974 Introduction to Plasma Physics (New York: Plenum Press) [24] Li W J and Bauhofer W 2011 Carbon 49 3891 -
Related Articles
[1] Man Xing, Jun Wang, Xi Zhao, Shushan Zhou. The Role of Multi-Electron and Multi-Orbital Effects in High-Order Harmonic Generation of Benzonitrile Molecules [J]. Chin. Phys. Lett., 2025, 42(4): 043201. doi: 10.1088/0256-307X/42/4/043201 [2] LI Na-Na, ZHAI Zhen, LIU Xue-Shen. High-Order Harmonic Generation from a Model of Ar+ Ionized Clusters [J]. Chin. Phys. Lett., 2008, 25(7): 2508-2510. [3] GE Yu-Cheng. Laser-Duration Dependence of Emission Properties of High-Order Harmonic Generation [J]. Chin. Phys. Lett., 2008, 25(4): 1305-1308. [4] GE Yu-Cheng. Laser Phase Relations of High-Order Harmonic Generation [J]. Chin. Phys. Lett., 2006, 23(9): 2461-2464. [5] PI Liang-Wen, SHI Ting-Yun, QIAO Hao-Xue. Enhancement of Bichromatic High-Order Harmonic Generation by a Strong Laser Field and Its Third Harmonic [J]. Chin. Phys. Lett., 2006, 23(6): 1490-1493. [6] WANG Bing-Bing, CHEN Jing, LIU Jie, LI Xiao-Feng, FU Pan-Ming. Carrier Envelope Phase Controlled High-Order Harmonic Generation in Ultrashort Laser Pulse [J]. Chin. Phys. Lett., 2005, 22(9): 2237-2240. [7] WANG Run-Hai, JIANG Hong-Bing, YANG Hong, WU Cheng-Yin, GONG Qi-Huang. High-Order Harmonic Generation by Two Non-Collinear Femtosecond Laser Pulses in CO [J]. Chin. Phys. Lett., 2005, 22(8): 1913-1915. [8] CHEN Jing, CHEN Shi-Gang, LIU Jie. High-Order Harmonic Generation in the Ionization Process [J]. Chin. Phys. Lett., 2000, 17(10): 723-725. [9] GAO Liang-hui, LI Xiao-feng, GUO Dong-sheng, FU Pan-ming. Formal Scattering Approach to High-Order Harmonic Generation [J]. Chin. Phys. Lett., 1999, 16(7): 502-504. [10] WANG Bing-bing, LI Xiao-feng, FU Pan-ming. High-Order Harmonic Generation in the Presence of Static Electric Field [J]. Chin. Phys. Lett., 1998, 15(3): 195-197.
DownLoad: