Fabrication of GaAs Nanowires by Colloidal Lithography and Dry Etching

A method for the fabrication of well-ordered periodic GaAs nanowires (NWs) is developed based on a combination of colloidal lithography and an inductively coupled plasma (ICP) etching technique using CHF₃/Ar and Cl₂/N₂/BCl₃ chemistry. The effects of etching parameters such as flow rate, and etching duration on NW fabrication are investigated. The reflectance spectra of the GaAs NW samples are measured and compared with NWs fabricated by molecular beam epitaxy.