Fabrication and Performance of Micro-sensors for Methane Detection Based on In-Pd-Co-SnO₂ Composite Nanofibers

In-Pd-Co-SnO₂ composite nanofibers have been synthesized by an electrospinning method and characterized by x−ray diffraction (XRD), scanning electron microscopy (SEM), and transmission electron microscopy (TEM). Micro-sensors with a tiny area of 1×1 mm² are fabricated by spinning the nanofibers on sensor substrates. Excellent CH₄ sensing properties are found based on the micro−sensors. The sensitivity is up to 13 when the sensors are exposed to 10 ppm CH₄ at 140°C, and the response and recovery times are about 8 and 14 s, respectively. High selectivity, good stability, and low power-consumption are also observed in the investigation.