Fabrication of High-Quality Niobium Superconducting Tunnel Junctions
Received Date:
March 16, 2011
Published Date:
July 31, 2011
Abstract
For high-quality superconducting tunnel junctions (STJs), it is necessary to reduce leakage current as much as possible. We describe the fabrication of niobium STJs using the selective niobium (Nb) etching process and various ways to minimize the leakage current. The experiment shows that the leakage current mainly comes from shorts in the tunnel barrier layer rather than those around the junction edges. Through systematic analysis of the thin film stress, surface morphology and modified junction structures, we fabricate high-quality Nb STJs with a gap voltage of 2.8 mV and a leakage current at 1 mV as low as 8.1% and 0.023% at 4.2 K and 0.3 K, respectively.
Article Text
References
[1]
Gurvitch M, Washington M A and Huggins H A 1983 Appl. Phys. Lett. 42 472
[2]
Huggins H A and Gurvitch M 1985 J. Appl. Phys. 57 2103
[3]
Morohashi S, Shinoki F, Shoji A and Aoyagi M 1985 Appl. Phys. Lett. 46 1179
[4]
Imamura T, Shiota T and Hasuo S 1992 IEEE Trans. Appl. Supercond. 2 1
[5]
Meng X F, Zheng L Z, Wong A and Van Duzer T 2001 IEEE Trans. Appl. Supercond. 11 365
[6]
Zmuidzinas J and Richards P L 2004 Proc. IEEE 92 1598
[7]
Nakamura Y et al 1999 Nature 398 786
[8]
Yu Y, Han S, Chu X, Chu S I and Wang Z 2002 Science 296 889
[9]
Tucker J R and Feldman M J 1985 Rev. Mod. Phys. 57 1055
[10]
Wu T et al 2006 Chin. Phys. Lett. 23 971
[11]
Yu H F et al 2008 Chin. Phys. B 17 3083
[12]
Wen X D and Yu Y 2008 Chin. Phys. Lett. 25 694
[13]
Ariyoshi S et al 2009 Appl. Phys. Lett. 95 193504
[14]
Li J et al 2007 Chin. Phys. Lett. 24 570
[15]
Kroger H, Smith L N and Jillie D W 1981 Appl. Phys. Lett. 39 280
[16]
Meng X F, Bhat A and Van Duzer T 1999 IEEE Trans. Appl. Supercond. 9 3208
[17]
Muller K H 1987 J. Appl. Phys. 62 1796
[18]
Joynson R E, Neugebauer C Aand Rairden J R 1967 J. Vac. Sci. Technol. 4 171
[19]
Lehnert T, Grassl C and et al 1991 Supercond. Sci. Technol. 4 419
[20]
Kohlstedt H, Gundlach K H and Schneider A 1991 IEEE Trans. Appl. Supercond. 27 3149
Related Articles
[1] YOU Fu-Yi, WANG Zhi-Gang, WAN Shao-Long. Analysis of the Vertexes ΣQ ΞQ * K* and Ξ'Q ΣQ * K* within Light-Cone QCD Sum Rules [J]. Chin. Phys. Lett., 2012, 29(2): 021101. doi: 10.1088/0256-307X/29/2/021101
[2] ZHOU Mi, JIANG Yong-Heng, LU Guo-Hui, GAO Shu-Qin, LI Zuo-Wei. Excitonic Coupling between B and Q Transitions in Porphyrin Aggregates [J]. Chin. Phys. Lett., 2009, 26(8): 083201. doi: 10.1088/0256-307X/26/8/083201
[3] WANG Zhi-Gang, WANG Zhi-Bin. Analysis of Vertex D*D*ρ with Light-Cone QCD Sum Rules [J]. Chin. Phys. Lett., 2008, 25(2): 444-446.
[4] WANG Zhi-Gang, WAN Shao-Long. Analysis of X(1576) as a Tetraquark State with the QCD Sum Rules [J]. Chin. Phys. Lett., 2006, 23(12): 3208-3210.
[5] ZHANG Zhen-Yu, LIU Jue-Ping. Stabilization and Consistency for Subtracted and Unsubtracted QCD Sum Rules for 0++ Scalar Glueball [J]. Chin. Phys. Lett., 2006, 23(11): 2920-2923.
[6] FANG Xiang-Zheng, RUAN Tu-Nan. Analysis of the Yrast Bands with q-Deformed Moment of Inertia [J]. Chin. Phys. Lett., 2001, 18(2): 193-195.
[7] YAO Yu-Jie, ZHANG Hai-Xia, ZHU Jiang-Ming, LIU Guang-Zhou, WU Shi-Shu. A Possible New Effect of Self-Consistency in the Relativistic Hartree-Fock Approximation [J]. Chin. Phys. Lett., 2000, 17(10): 720-722.
[8] B. P. Nigam. Perturbative Quantum Chromodynamics αs 4 -Order Corrections to the Ratio R for τ Decay [J]. Chin. Phys. Lett., 1998, 15(10): 711-712.
[9] JIANG Yong-yuan, FENG Yu-wen, ZHOU Zhong-xiang, LI Yan, SUN Xiu-dong, XU Ke-bin. Two-dimensional Perturbative Analysis of Slant Grating in Photorefractive Crystals in an External Electric Field [J]. Chin. Phys. Lett., 1998, 15(6): 423-425.
[10] NIE Xiangfu, TANG Guide, HAN Baoshan. Self-collapse of Dumbbell Domains in Garnet Bubble Films [J]. Chin. Phys. Lett., 1991, 8(8): 420-423.
Cited by Periodical cited type(1)
1.
Lhachemi, M.N.Y., Garate, I. Phononic dynamical axion in magnetic Dirac insulators. Physical Review B, 2024, 109(14): 144304.
DOI:10.1103/PhysRevB.109.144304
Other cited types(0)
About This Article
Cite this article:
XU Qin-Yin, CAO Chun-Hai, LI Meng-Yue, JIANG Yi, ZHA Shi-Tong, KANG Lin, XU Wei-Wei, CHEN Jian, WU Pei-Heng. Fabrication of High-Quality Niobium Superconducting Tunnel Junctions[J].
Chin. Phys. Lett. , 2011, 28(8): 087403.
DOI: 10.1088/0256-307X/28/8/087403
XU Qin-Yin, CAO Chun-Hai, LI Meng-Yue, JIANG Yi, ZHA Shi-Tong, KANG Lin, XU Wei-Wei, CHEN Jian, WU Pei-Heng. Fabrication of High-Quality Niobium Superconducting Tunnel Junctions[J]. Chin. Phys. Lett. , 2011, 28(8): 087403. DOI: 10.1088/0256-307X/28/8/087403
DownLoad: