Effect of the Viscosity of Silicone Oil on the Aggregation Behavior of C:F Clusters on a Silicone Oil Liquid Substrate

We investigate the effect of silicone oil viscosity on the aggregation behavior of C:F clusters deposited on silicone oil liquid substrates with viscous coefficients of 100, 350 and 500 mm²/s by C₄F₈ dual−frequency capacitively coupled plasma. The aggregated C:F clusters all exhibit a branch-like fractal structure. However, the fractal dimension decreases from 1.67 to 1.45 with the silicone oil viscous coefficient increasing from 100 mm²/s to 500 mm²/s. Owing to the fractal dimension of 1.67 and 1.45, corresponding to the diffusion-limited-aggregation (DLA) model and the cluster-cluster-aggregation (CCA) model respectively, the results show that the increase of silicone oil viscosity can lead to the change of C:F clusters aggregating on a silicone oil liquid substrate from DLA to CCA growth.