| FUNDAMENTAL AREAS OF PHENOMENOLOGY(INCLUDING APPLICATIONS) |
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Silicon-on-Insulator-Based Broadband 1$\times$3 Adiabatic Splitter with Simultaneous Tapering of Velocity and Coupling |
| Yuan-Hao Gong, Zhi-Yong Li, Jin-Zhong Yu, Yu-De Yu** |
State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083
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| Cite this article: |
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Yuan-Hao Gong, Zhi-Yong Li, Jin-Zhong Yu et al 2016 Chin. Phys. Lett. 33 094201 |
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Abstract We propose and experimentally demonstrate a broadband $1\times3$ adiabatic splitter based on the silicon-on-insulator technology, with simultaneous tapering of velocity and coupling. The designed structure becomes simulated transmission uniformity of three outputs better than 0.5 dB in a broadband of 250 nm, and a large simulated fabrication tolerance is obtained. A manufactured splitter whose parameters greatly diverge from the design acquires a measured result of the worst splitting ratio better than 1.5 dB as well as an excess loss lower than 0.8 dB in a large wavelength range of 80 nm. A post-simulation based on the tested splitter obtains a result that meets the actual transmission well.
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Received: 06 May 2016
Published: 30 September 2016
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| PACS: |
42.82.Cr
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(Fabrication techniques; lithography, pattern transfer)
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42.82.Ds
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(Interconnects, including holographic interconnects)
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42.82.Bq
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(Design and performance testing of integrated-optical systems)
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