| FUNDAMENTAL AREAS OF PHENOMENOLOGY(INCLUDING APPLICATIONS) |
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Characterization of La-doped $x$BiInO$_{3}(1-x)$PbTiO$_{3}$ Piezoelectric Films Deposited by the Radio-Frequency Magnetron Sputtering Method |
| Ke-Xue Sun1, Shu-Yi Zhang1**, Kiyotaka Wasa1,2, Xiu-Ji Shui1 |
1Laboratory of Modern Acoustics, Institute of Acoustics, Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Nanjing 210093
2Graduate School of Yokohama City University, Yokohama 236-0027, Japan
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| Cite this article: |
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Ke-Xue Sun, Shu-Yi Zhang, Kiyotaka Wasa et al 2016 Chin. Phys. Lett. 33 064301 |
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Abstract La-doped and undoped $x$BiInO$_{3}$-$(1-x)$PbTiO$_{3}$ (BI-PT) thin films are deposited on (101)SrRuO$_{3}$/(100)Pt/(100) MgO substrates by the rf-magnetron sputtering method. The structures of the films are characterized by XRD and SEM, and the results indicate that the thin films are grown with mainly (100) oriented and columnar structures. The ferroelectricity and piezoelectricity of the BI-PT films are also measured, and the measured results illustrate that both performances are effectively improved by the La-doping with suitable concentrations. These results will open up wide potential applications of the films in electronic devices.
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Received: 29 January 2016
Published: 30 June 2016
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| PACS: |
43.90.+v
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(Other topics in acoustics)
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43.35.+d
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(Ultrasonics, quantum acoustics, and physical effects of sound)
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68.60.Bs
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(Mechanical and acoustical properties)
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| [1] | Eitel R E, Randall C A, Shrout T R, Park S E, Rehrig P and Hackenberger W 2001 Jpn. J. Appl. Phys. 40 5999 | | [2] | Duan R, Speyer R F, Alberta E and Shrout T R 2004 J. Mater. Res. 19 2185 | | [3] | Zhang S J, Xia R, Randall C A and Shrout T R 2005 J. Mater. Res. 20 2067 | | [4] | Datta K, Gorfman S and Thomas P A 2009 Appl. Phys. Lett. 95 251901 | | [5] | Wen H, Wang X H, Deng X Y and Li L T 2006 Appl. Phys. Lett. 88 222904 | | [6] | Ko S W, Yeo H G and Trolier-McKinstry S 2009 Appl. Phys. Lett. 95 162901 | | [7] | Zhong C F, Wang X H, Fang J and Li L T 2010 J. Am. Ceram. Soc. 93 3305 | | [8] | Lee S Y, Ko S W, Lee S and Trolier-McKinstry S 2012 Appl. Phys. Lett. 100 212905 | | [9] | Li Z F 2008 J. Wuhan University Technol.-Mater. Sci. Ed. 23 859 | | [10] | Shannon R D 1976 Acta Crystallogr. A 32 751 | | [11] | Ganguly P 2015 J. Rare Earths 33 1310 | | [12] | Kanno I, Kotera H and Wasa K 2003 Sens. Actuators A 107 68 | | [13] | Zhang T, Wasa K, Zhang S Y, Chen Z J, Zhou F M, Zhang Z N and Yang Y T 2009 Appl. Phys. Lett. 94 122909 | | [14] | Morimoto K, Kanno I, Wasa K and Kotera H 2010 Sens. Actuators A: Phys. 163 428 | | [15] | Zhang T, Zhang S Y, Wasa K, Zhang H, Chen Z J, Shui X J and Yang Y T 2011 Phys. Status Solidi A 208 2460 |
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