| CONDENSED MATTER: ELECTRONIC STRUCTURE, ELECTRICAL, MAGNETIC, AND OPTICAL PROPERTIES |
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A Numerical Method for Modeling the Effects of Irregular Shape on Interconnect Resistance |
| CHEN Bao-Jun1**, TANG Zhen-An2, JU Yan-Jie1 |
1School of Electronics and Information Engineering, Dalian Jiaotong University, Dalian 116028
2School of Electronic Science and Technology, Dalian University of Technology, Dalian 116023
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| Cite this article: |
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CHEN Bao-Jun, TANG Zhen-An, JU Yan-Jie 2014 Chin. Phys. Lett. 31 057102 |
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Abstract When clock frequencies exceed gigahertz, the skin depth in analog and digital circuits greatly decreases. The irregular shape of the cross section of the interconnect plays an increasingly important role in interconnect parasitic extraction. However, existing methods only focus on the rough surface of the interconnect, while ignoring other irregular shapes, such as the trapezoidal cross section. In this work, a new simulation method is proposed for irregular interconnects, which is applicable to arbitrary irregular shapes and to a wide range of frequencies. The method involves generating a mesh information file firstly, and then extracting the frequency-dependent resistance based on a numerical solution of scalar wave modeling by using the method of moments. The singularity extraction method is used to calculate the self-inductors. The data from experiments verify the accuracy of our proposed method.
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Published: 24 April 2014
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| PACS: |
71.10.-w
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(Theories and models of many-electron systems)
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71.15.-m
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(Methods of electronic structure calculations)
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72.10.-d
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(Theory of electronic transport; scattering mechanisms)
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