| PHYSICS OF GASES, PLASMAS, AND ELECTRIC DISCHARGES |
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Comparative Study on Excitation Temperature, Electron Temperature and Electron Density in an Atmospheric Argon Microwave Plasma |
| WANG Zhong**, ZHANG Gui-Xin, LIU Cheng, JIA Zhi-Dong |
Department of Electrical Engineering, Tsinghua University, Beijing 100084
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| Cite this article: |
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WANG Zhong, ZHANG Gui-Xin, LIU Cheng et al 2014 Chin. Phys. Lett. 31 055203 |
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Abstract An infinite-volume of atmospheric argon microwave plasma is produced in the microwave plasma source based on the inductive coupling window-rectangular resonator under the input of the microwave power at 2.45 GHz. The excitation temperature of the plasma is studied by using the Boltzmann plot of Ar I lines in two different wavelength ranges while the electron temperature is researched by using line-to-continuum intensity ratio of Ar I lines. The electron density is compared by using the Stark broadenings of Ar I lines at 522.13 nm and 549.59 nm and Hβ line at 486.13 nm.
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Published: 24 April 2014
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| PACS: |
52.80.Pi
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(High-frequency and RF discharges)
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52.50.Dg
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(Plasma sources)
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52.70.Kz
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(Optical (ultraviolet, visible, infrared) measurements)
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[1] Wang Z, Zhang G X, Liu C and Jia Z D 2014 Chin. Phys. Lett. 31 055202
[2] Verhoff B, Harilal S S, Freeman J R, Diwakar P K and Hassanein A 2012 J. Appl. Phys. 112 093303
[3] Sola A, Calzada M D and Gamero A 1995 J. Phys. D: Appl. Phys. 28 1099
[4] Bussiere W, Vacher D, Menecier S and Andre P 2011 Plasma Sources Sci. Technol. 20 045004
[5] Hofsaess D 1979 At. Data Nucl. Data Tables 24 285
[6] Menart J, Heberlein J and Pfender E 1996 J. Quant. Spectrosc. Radiat. Transfer. 56 377
[7] Calzada M D 2005 Mem. S. A. It. 7 198
[8] Laux C O, Spence T G, Kruger C H and Zare R N 2003 Plasma Sources Sci. Technol. 12 125
[9] Pellerin S, Musiol K, Pokrzywka B and Chapelle J 1996 J. Phys. B: At. Mol. Opt. Phys. 29 3911
[10] Griem H R 1964 Plasma Spectroscopy (New York: McGraw-Hill)
[11] Magdalena C, Milan S D and Sylvie S B 2005 Mem. S. A. It. 7 238
[12] Yubero C, Dimitrijevic M S, Garcia M C and Calzada M D 2007 SpectroChim. Acta Part. B 62 169
[13] Yubero C, Calzada M D and Garcia M C 2005 J. Phys. Soc. Jpn. 74 2249 |
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