| CROSS-DISCIPLINARY PHYSICS AND RELATED AREAS OF SCIENCE AND TECHNOLOGY |
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A Novel CMOS Device Capable of Measuring Near-Field Thermal Radiation |
| FENG Chong, TANG Zhen-An, YU Jun** |
School of Electronic Science and Technology, Dalian University of Technology, Dalian 116023
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| Cite this article: |
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YU Jun, TANG Zhen-An, FENG Chong 2012 Chin. Phys. Lett. 29 038502 |
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Abstract We report on the design, fabrication, and characterization of a micro plane-plane geometry CMOS device, which has a heat emitter and a heat receiver, capable of studying the near-field radiative heat transfer at a 550 nm gap. Under high vacuum conditions, the heat emitter is heated by supplying driving currents and heated again after removing the heat receiver. The heating power difference between the two kinds of heating experiments indicates the existence of a proximity effect in the heat transfer between the emitter and the receiver. Our experiments pave the way towards overcoming the construction difficulty of plane-plane geometry with a nanometer gap.
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| Keywords:
85.40.-e
44.40.+a
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Received: 17 November 2011
Published: 11 March 2012
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| PACS: |
85.40.-e
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(Microelectronics: LSI, VLSI, ULSI; integrated circuit fabrication technology)
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44.40.+a
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(Thermal radiation)
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