| NUCLEAR PHYSICS |
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Thermal Annealing Behavior of Helium in Ti Films Deposited by Magnetron Sputtering |
| ZHANG Lei, HE Zhi-Jiang, LIU Chao-Zhuo, WANG Xu-Fei, SHI Li-Qun** |
| Applied Ion Beam Physics Laboratory, Institute of Modern Physics, Fudan University, Shanghai 200433 |
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ZHANG Lei, HE Zhi-Jiang, LIU Chao-Zhuo et al 2012 Chin. Phys. Lett. 29 012501 |
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Abstract Helium contents of up to 30at.% are prepared in sputter-deposited Ti films. Isochronal annealing behaviors of helium including the depth profiles and the evolution of helium bubbles in the films at different temperatures are examined by ion beam analysis including Rutherford backscattering spectrometry (RBS) and elastic recoil detection analysis (ERDA), as well as thermal helium desorption spectroscopy (THDS). It is found that the energy spreading induced by structural inhomogeneities in the spectra of RBS and ERDA as well as the increment in the width of spectra occurs, which corresponds to the change of stopping cross-section of helium atoms in the Ti film due to the change of physical-state of helium in the evolution of helium bubble. The ion beam analysis on the helium evolution is consistent with the THDS measurement. Ion beam technique opens interesting possibilities in the characterizing on the growth of helium bubbles.
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| Keywords:
25.60.Bx
28.52.Fa
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Received: 30 July 2011
Published: 07 February 2012
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| [1] Ullmaier H 1983 Proc. Int. Symp. on Fundamental Aspects of Helium in Metals New YorkUllmaier H 1983 Proc. Int. Symp. on Fundamental Aspects of Helium in Metals (New York: Plenum) [2] Lucas A A 1984 Physical B+C 127 225 [3] Donnelly S E and Evans J H 1991 Fundamental Aspects of Inert Gases in Solids (New York: Plenum) [4] Cowgill D F 2005 Fusion Sci. Technol. 48 539 [5] Markwitz A, Johnson P B, Gilberd P W and Collins G A 2002 Nucl. Instrum. Methods B 190 718 [6] Johnson P B, Markwitz A and Gilberd P W 2001 Adv. Mater. 13 997 [7] Rajainmäki H, Linderoth S, Hansen H E, Nieminen R M and Bentzon M D 1988 Phys. Rev. B 38 1087 [8] Shi L Q, Liu C Z, Xu S L and Zhou Z Y 2005 Thin Solid Films 479 52 [9] Zheng H, Liu S, Yu H B, Wang L B, Liu C Z and Shi L Q 2005 Mater. Lett. 59 10715 [10] Jensen K O, Eldrup M, Singh B N and Victoria M 1988 J. Phys. F: Met. Phys. 18 1069 [11] Grynszpan A R I, Baclet N, Darque A, Flament J L, Zielinski F, Anwand W and Brauer G 2006 Appl. Surf. Sci. 252 3252 [12] Nagata S, Takahiro K and Yamaguchi S 1998 Nucl. Instrum. Methods B 136 680 [13] Liu C Z and Shi L Q 2004 Chin. Phys. Lett. 21 1035 [14] Stoquert J P and Szorenyi T 2002 Phys. Rev. B 66 144108 [15] Yu H B, Liu S, Hu K Y, Wang L B and Rong L J 2005 Atomic Energy Science and Technology 39 530 [16] Thwaites D I and Watt D E 1978 Phys. Med. Biol. 23 426 |
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