| FUNDAMENTAL AREAS OF PHENOMENOLOGY(INCLUDING APPLICATIONS) |
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Resonance Effects of Bilayered Piezoelectric Films Used for Bulk Acoustic Wave Sensors |
| ZHANG Hui**, ZHANG Shu-Yi, FAN Li
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Laboratory of Modern Acoustics, Institute of Acoustics, Nanjing University, Nanjing 210093
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| Cite this article: |
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ZHANG Hui, ZHANG Shu-Yi, FAN Li 2011 Chin. Phys. Lett. 28 114301 |
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Abstract The resonance vibrations of acoustic sensors with two layers of (1120) textured hexagonal piezoelectric films are studied. When the acoustic and electric fields satisfy a special match condition, i.e. the phase variation of thickness shear mode (TSM) at each film equals π, both piezoelectric layers with opposite polarization directions reduce the first TSM and generate the second TSM with higher frequency and a higher quality factor. The excited second TSM can increase the product of the operating frequency and the quality factor, which is useful for improving the mass sensitivity and resolution of acoustic sensors. Additionally, both of the piezoelectric films have larger thickness and decrease the risk of mechanical damage in device production processes.
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| Keywords:
43.38.Fx
43.38.Ar
43.20.Ks
43.20.Gp
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Received: 24 June 2011
Published: 30 October 2011
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| PACS: |
43.38.Fx
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(Piezoelectric and ferroelectric transducers)
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43.38.Ar
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(Transducing principles, materials, and structures: general)
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43.20.Ks
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(Standing waves, resonance, normal modes)
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43.20.Gp
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(Reflection, refraction, diffraction, interference, and scattering of elastic and poroelastic waves)
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