| CROSS-DISCIPLINARY PHYSICS AND RELATED AREAS OF SCIENCE AND TECHNOLOGY |
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Fabrication of a Polymer Micro Needle Array by Mask-Dragging X-Ray Lithography and Alignment X-Ray Lithography |
| LI Yi-Gui1**, YANG Chun-Sheng1, LIU Jing-Quan1, SUGIYAMA Susumu2
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1Institute of Key Laboratory for Thin Film and Microfabrication Technology of Ministry of Education, Research Institute of Micro/Nano Science and Technology, Shanghai Jiao Tong University, Shanghai 200240
2Global Innovation Research Center, Ritsumeikan University, Kusatsu, Shiga 525-8577, Japan
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| Cite this article: |
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LI Yi-Gui, YANG Chun-Sheng, LIU Jing-Quan et al 2011 Chin. Phys. Lett. 28 038101 |
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Abstract Polymer materials such as transparent thermoplastic poly(methyl methacrylate) (PMMA) have been of great interest in the research and development of integrated circuits and micro-electromechanical systems due to their relatively low cost and easy process. We fabricated PMMA-based polymer hollow microneedle arrays by mask-dragging and aligning x-ray lithography. Techniques for 3D micromachining by direct lithography using x-rays are developed. These techniques are based on using image projection in which the x-ray is used to illuminate an appropriate gold pattern on a polyimide film mask. The mask is imaged onto the PMMA sample. A pattern with an area of up to 100 ×100 mm2 can be fabricated with sub-micron resolution and a highly accurate order of a few microns by using a dragging mask. The fabrication technology has several advantages, such as forming complex 3D micro structures, high throughput and low cost.
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| Keywords:
81.16.Nd
81.16.Rf
81.07.Oj
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Received: 13 October 2010
Published: 28 February 2011
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| PACS: |
81.16.Nd
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(Micro- and nanolithography)
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81.16.Rf
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(Micro- and nanoscale pattern formation)
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81.07.Oj
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(Nanoelectromechanical systems (NEMS))
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