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Measurements of Film Thickness and Growth Temperature of YBa2Cu3O7-δ Films by Pyrometric Absorption Method |
XIONG Xu-ming;ZHOU Yue-liang;WANG Hui-sheng;CUI Da-fu;LU Hui-bin;CHEN Zheng-hao;YANG Guo-zhen |
Optical Physics Laboratory, Institute of Physics, Chinese Academy of Sciences, Beijing 100080 |
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Cite this article: |
XIONG Xu-ming, ZHOU Yue-liang, WANG Hui-sheng et al 1997 Chin. Phys. Lett. 14 367-370 |
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Abstract A pyrometric absorption method suitable for strongly absorbing films has been developed to monitor the YBa2Cu3O7-δ film growth. This method makes use of the temperature difference between the heater and the substrate. By deducing the absorption formula of radiation light and fitting it to the radiation intensity data measured, it is possible to monitor the film thickness and the film surface temperature during deposition. Experimental results show that this is a simple and practicable method.
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Keywords:
68.55.Jk
68.55.-a
74.76.Bz
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Published: 01 May 1997
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