| FUNDAMENTAL AREAS OF PHENOMENOLOGY(INCLUDING APPLICATIONS) |
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Generation of Optical Vortex Using a Spiral Phase Plate Fabricated in Quartz by Direct Laser Writing and Inductively Coupled Plasma Etching |
| CHEN Jun1,2, KUANG Deng-Feng1, GUI Min1, FANG Zhi-Liang1 |
| 1The Key Laboratory of Opto-electronic Information Science and Technology, Institute of Modern Optics (Ministry of Education), Nankai University, Tianjin 3000712Department of Physics, Taishan University, Tai'an 271021 |
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| Cite this article: |
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CHEN Jun, KUANG Deng-Feng, GUI Min et al 2009 Chin. Phys. Lett. 26 014202 |
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Abstract A simple, economical and reliable technique is proposed for fabricating a spiral phase plate (SPP) in a quartz substrate to generate optical vortex with a unit topological charge at the wavelengths of 632.8nm. The spiral phase plate is first formed in the photoresist by direct laser writing lithography and then transferred into the quartz substrate by inductively coupled plasma etching. The performance of the fabricated SPP is verified by using beam intensity distribution, which is in agreement with the theoretical calculation result. The interference measurement suggests that we have succeeded to generate optical vortex with a unit topological charge with the fabricated SPP.
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| Keywords:
42.25.Fx
42.79.Hp
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Received: 18 July 2008
Published: 24 December 2008
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| PACS: |
42.25.Fx
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(Diffraction and scattering)
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42.79.Hp
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(Optical processors, correlators, and modulators)
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