CONDENSED MATTER: ELECTRONIC STRUCTURE, ELECTRICAL, MAGNETIC, AND OPTICAL PROPERTIES |
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Influence of Concentration of Vanadium in Zinc Oxide on Structural and Optical Properties with Lower Concentration |
WANG Li-Wei1,2,3, XU Zheng1, MENG Li-Jian2,3, Vasco Teixeira3, SONG Shi-Geng4, XU Xu-Rong1 |
1Institute of Optoelectronics Technology, and Key Laboratory of Luminescence and Optical Information, Beijing Jiaotong University, Beijing 1000442Departamento de Fisica, Instituto Superior de Engenharia do Porto, Rua Dr. Antonio Bernardino de Almeida 431, 4200-072 Porto, Portugal3Centro de Fisica, Universidade do Minho, Campus de Azurem, 4800-058 Guimaraes, Portugal4Thin Film Center, University of Paisley, Paisley PA1 2BE, Scotland |
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Cite this article: |
WANG Li-Wei, XU Zheng, MENG Li-Jian et al 2009 Chin. Phys. Lett. 26 077801 |
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Abstract ZnO films doped with different vanadium concentrations are deposited onto glass substrates by dc reactive magnetron sputtering using a zinc target doped with vanadium. The vanadium concentrations are examined by energy dispersive spectroscopy (EDS) and the charge state of vanadium in ZnO thin films is characterized by x-ray photoelectron spectroscopy. The results of x-ray diffraction (XRD) show that all the films have a wurtzite structure and grow mainly in the c-axis orientation. The grain size and residual stress in the deposited films are estimated by fitting the XRD results. The optical properties of the films are studied by measuring the transmittance. The optical constants (refractive index and extinction coefficient) and the film thickness are obtained by fitting the transmittance. All the results are discussed in relation with the doping of the vanadium.
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Keywords:
78.20.-e
78.20.Ci
68.55.-a
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Received: 19 December 2008
Published: 02 July 2009
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PACS: |
78.20.-e
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(Optical properties of bulk materials and thin films)
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78.20.Ci
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(Optical constants (including refractive index, complex dielectric constant, absorption, reflection and transmission coefficients, emissivity))
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68.55.-a
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(Thin film structure and morphology)
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