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Demonstration of Four Fundamental Operations of Liquid Droplets for Digital Microfluidic Systems Based on an
Electrowetting-on-Dielectric Actuator |
| YUE Rui-Feng;WU Jian-Gang;ZENG Xue-Feng;KANG Ming;LIU Li-Tian |
| Institute of Microelectronics, Tsinghua University, Beijing 100084 |
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| Cite this article: |
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YUE Rui-Feng, WU Jian-Gang, ZENG Xue-Feng et al 2006 Chin. Phys. Lett. 23 2303-2306 |
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Abstract An electrowetting-on-dielectric actuator is developed, in which the liquid is sandwiched between top and bottom plates. For the bottom plate, silicon wafer is used as the substrate, the heavily phosphorus-doped polysilicon film is deposited by low pressure chemical vapour deposition as the microelectrode array, and thermally grown SiO2 film as the dielectric layer. The top plate is a glass plate covered with transparent and conductive indium tin oxide as the ground electrode. In addition, a TeflonR AF1600 film is spun on the surface of both the plates as the hydrophobic layer. The experimental results show that when the gap height between two plates is 133μm, a prototype of the device is capable of creating, transporting, merging and dividing droplets of deionized water in an
air environment with a 70V at 10Hz voltage pulse. This is also established by simulations using the computational fluidic software of CFD-ACE+.
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| Keywords:
85.85.+j
47.62.+q
68.08.Bc
47.55.Dz
82.35.Gh
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Published: 01 August 2006
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