Effects of Hydrogen Ion Bombardment on Carbon Terminated
Si (111) Surface Studied by LEED and AES

Chin. Phys. Lett.

1994, Vol. 11

Issue (8): 498-501 DOI:

Original Articles

Effects of Hydrogen Ion Bombardment on Carbon Terminated Si (111) Surface Studied by LEED and AES

HU Xiaoming;LIN Zhangda

State Key Laboratory of Surface Physics, Institute of Physics, Academia Sinica, Beijing 100080

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HU Xiaoming, LIN Zhangda 1994 Chin. Phys. Lett. 11 498-501

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Abstract Etching effects of hydrogen ions on the Si(111)-(1x1)C surface have been studied by LEED (low-energy electron diffraction) and AES (Auger electron spectroscopy). It has been found that hydrogen ions, can break the carbon-silicon covalent bonds and cause a phase transition of Si(111)-(1x1)C to the reconstructed Si(111)-(7x7) structure.

Keywords: 61.14.Hg 68.35.Rh 82.65.My

Published: 01 August 1994

PACS:	61.14.Hg
	68.35.Rh	(Phase transitions and critical phenomena)
	82.65.My

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https://cpl.iphy.ac.cn/ OR https://cpl.iphy.ac.cn/Y1994/V11/I8/0498

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