Probe Contamination Effect in Silane Plasma and its Improvement

Chin. Phys. Lett.

1993, Vol. 10

Issue (2): 100-102 DOI:

Original Articles

Probe Contamination Effect in Silane Plasma and its Improvement

XI Zhonghe;ZHANG Guanghua;YANG Fan;XU Fang;ZHANG Qiang^*

Department of RadieElectronics, Peking University, Beijing 100871 ^*Beijing Union University, College of Electronics Engineering, Beijing 100083

Cite this article:

XI Zhonghe, ZHANG Guanghua, YANG Fan et al 1993 Chin. Phys. Lett. 10 100-102

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Abstract The contamination behavior of Langmuir probe in silane glow discharge plasma are discussed. A hot electrical probe is suggested to improve the diagnostics of SiH₄ plasma. Results show the safe duration for reliable measurements of electron temperature can be as long as 40min by this method.

Keywords: 52.70.Gw

Published: 01 February 1993

PACS:

52.70.Gw

(Radio-frequency and microwave measurements)

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https://cpl.iphy.ac.cn/ OR https://cpl.iphy.ac.cn/Y1993/V10/I2/0100

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