Investigation of Optical Properties of Amorphous Gap Films

Chin. Phys. Lett.

1991, Vol. 8

Issue (4): 187-190 DOI:

Original Articles

Investigation of Optical Properties of Amorphous Gap Films

XU Jianhong;CHEN Kunji;ZHU Enjun^*

Department of Physics and Labrotory of Solid State Microstructures, Nanjing Uniuersity, Nanjing 210008 ^*Department of Computer Science and Institute of Microelectronics, Peking University, Beijing 100871

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XU Jianhong, CHEN Kunji, ZHU Enjun 1991 Chin. Phys. Lett. 8 187-190

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Abstract The optical properties of amorphous Gap (a-Gap) films prepared by plasma enhanced transport deposition method in the system of Ga-PCl₃-H₂ have been studied. The optical energy band gap E^opt_g of a-Gap films is about 1.6 e V which depends on the contents of Cl atoms. The results of exponential absorption edge indicate that there is a high density of band-tail states in the optical energy band gap.

Keywords: 61.40.+b 78.65.Fa 81.15.Gh

Published: 01 April 1991

PACS:	61.40.+b
	78.65.Fa
	81.15.Gh	(Chemical vapor deposition (including plasma-enhanced CVD, MOCVD, ALD, etc.))

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https://cpl.iphy.ac.cn/ OR https://cpl.iphy.ac.cn/Y1991/V8/I4/0187

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	CHEN Kunji
	ZHU Enjun

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