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Initial Growth of Thin Films with Low Nucleus Density and Linear Lateral Growth Rate on a Substrate Surface |
SHAO Qing-Yi1,2;FANG Rong-Chuan1;ZHU Kai-Gui1;LIAO Yuan1;XUE Zeng-Quan2 |
1Structure Research Laboratory and Department of Physics, University of Science and Technology of China, Hefei 230026
2Department of Electronics, Peking University, Beijing 100871
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Cite this article: |
SHAO Qing-Yi, FANG Rong-Chuan, ZHU Kai-Gui et al 2001 Chin. Phys. Lett. 18 1135-1137 |
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Abstract Based on corrected rate equations, the kinetics is revealed for initial growth of thin films with low nucleus density and linear lateral growth rate on a substrate surface. In this case, the mobility and coalescence terms in rate equations are neglected, and the coverage term takes a dominant role. All the calculated results are in agreement with experimental data. These results introduce a new scaling in the case of dominant coverage, which is different from the those in the case of coalescence or mobility in a dominant role.
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Keywords:
81.15.Aa
68.55.Jk
81.15.Kk
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Published: 01 August 2001
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