| Original Articles |
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Modification of TiN Coatings by N+ and C+ Implantation with High Ion Flux |
| ZHANG Tong-he;WU Yu-guang;ZHAO Zhi-yong;DENG Zhi-wei |
| Institute of Low Energy Nuclear Physics, Radiation Beam and Materials Engineering Open Laboratory of Department of Education of China, Beijing Radiation Center, Beijing Normal University, Beijing 100875 |
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| Cite this article: |
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ZHANG Tong-he, WU Yu-guang, ZHAO Zhi-yong et al 1999 Chin. Phys. Lett. 16 196-198 |
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Abstract The TiN coating changed from columnar structure to compact texture after N+ and C+ implantation. X-ray analysis showed that combining with N atoms, Ti and Ti2N would be transformed into TiN Phases during N implantation. The ternary solid solution mixtures TiCN have been formed, while Ti, Ti2N would be transformed into TiC and TiCN phases combining with C atoms after C implantation. The hardness of the TiN coating increased by 2.3-2.4 times after N+ or C+ implantation. The wear resistance of implanted TiN coatings is 2-3 times higher than that of unimplanted TiN coatings. When the drills were treated with the method, their lifetime would increase by 7 times comparing with unimplanted ones. As an attractive procedure, the ion implantation of the TiN coatings would find new applications in many fields.
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| Keywords:
61.72.Ww
62.20.-x
68.55.Ln
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Published: 01 March 1999
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| PACS: |
61.72.Ww
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62.20.-x
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(Mechanical properties of solids)
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68.55.Ln
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(Defects and impurities: doping, implantation, distribution, concentration, etc.)
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