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Light Irradiation through Small Particles and Its Applications for Surface Nanostructuring in Near Field |
| 1Department of Mechanical Engineering, National University of Singapore, Singapore 1175762Data Storage Institute, Agency for Science, Technology and Research, Singapore 1176083Department of Electrical and Computer Engineering, National University of Singapore, Singapore 117576 |
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| Cite this article: |
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ZHOU Yi(周毅)$^{, }$, HONG Ming-Hui(洪明辉)$^{ et al 2007 Chin. Phys. Lett. 24 2947-2950 |
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Abstract We investigate the light scattering through small particles and its applications in nanostructuring, such as nanobumping, nanopatterning and dry laser cleaning. The theoretical calculation based on Mie theory provides an exact solution for sphere cavity resonance and plasmon resonance, which are two mechanisms for dielectric and metallic particles assisted surface nanostructuring in near field. The experimental results indicate that nanobumps on glass surface and subwavelength holes array on silicon surface can be formed without cracks with the self-assembly of 1μm silica particle mask under laser irradiation. It is also found that the scattering wave by 40nm gold particles can propagate 200 times away in terms of particle radius as recorded by photoresist under the UV light irradiation. Meanwhile, dry laser cleaning of 40nm gold particle on silicon wafer is demonstrated
at plasmonic resonance frequency. The total cleaning efficiency is estimated to be 80%.
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| Keywords:
73.50.Bk
78.66.Vs
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Received: 15 June 2007
Published: 20 September 2007
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| PACS: |
73.50.Bk
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(General theory, scattering mechanisms)
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78.66.Vs
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(Fine-particle systems)
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