Chin. Phys. Lett.  2008, Vol. 25 Issue (1): 310-313    DOI:
Original Articles |
Pt/Ti Electrodes of PZT Thin Films Patterning by Novel Lift-Off Using ZnO as a Sacrificial Layer
LI Jun-Hong;WANG Cheng-Hao;XU Lian;XIE Shu
Institute of Acoustics, Chinese Academy of Sciences, Beijing 100080
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LI Jun-Hong, WANG Cheng-Hao, XU Lian et al  2008 Chin. Phys. Lett. 25 310-313
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Abstract We achieve a successful novel lift-off of patterning Pt/Ti electrodes on SiO2/Si substrates by employing ZnO sacrificial layer deposition and patterning, successive uniform Pt/Ti deposition and final lift-off. Then we deposit PZT thin films on the electrodes. Compared with the conventional lift-off processes for the electrodes, this novel process does not need post-annealing, which must be performed after conventional lift-off process. It is demonstrated that the electrodes patterned by the novel lift-off process have stronger adhesion. The electrodes and the PZT films on the electrodes are more compact and smoother than those by the conventional lift-off process.
Keywords: 81.65.Cf      68.55.-a      42.62.Cf     
Received: 07 September 2007      Published: 27 December 2007
PACS:  81.65.Cf (Surface cleaning, etching, patterning)  
  68.55.-a (Thin film structure and morphology)  
  42.62.Cf (Industrial applications)  
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https://cpl.iphy.ac.cn/       OR      https://cpl.iphy.ac.cn/Y2008/V25/I1/0310
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LI Jun-Hong
WANG Cheng-Hao
XU Lian
XIE Shu
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