| Original Articles |
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Effect of (2×1) Surface Reconstruction on Elasticity of a Silicon Nano-Plate |
| WANG Jing;HUANG Qing-An;YU Hong |
| Key Laboratory of MEMS of Ministry of Education, Southeast University, Nanjing 210096 |
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| Cite this article: |
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WANG Jing, HUANG Qing-An, YU Hong 2008 Chin. Phys. Lett. 25 1403-1406 |
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Abstract A semi-continuum approach is developed to describe the effect of (2×1) surface reconstruction on the elastic modulus of the silicon nano-plate. Young's moduli of a (001) silicon nano-plate along the high-symmetry [100] direction are obtained with and without considering (2×1) surface
reconstruction. The approach predicts that the nano-plate with unreconstructed (001) surface is elastically softer than the bulk while it exhibits the opposite behaviour with (2×1) reconstructed surface. On the (001) surface, the (2×1) reconstructed surface dominates the plate as the thickness of the plate scaling decreases to several tens of nanometre. Whether the nano-plate is softer or stiffer depends on bond loss, bond saturation and direction of bond alignment, which have major impacts on the
mechanics of the nano-plate.
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| Keywords:
71.55.Cn
61.46.-w
62.20.Dc
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Received: 31 August 2007
Published: 31 March 2008
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[1] Renault P O et al %, Bourhis E L, Villain P, Goudeau P,%Badawi K F and Faurie D2003 Appl. Phys. Lett. 83 473
[2] Villain P et al %, Goudeau P, Renault P O, K and Badawi K F2002 Appl. Phys. Lett. 81 4365
[3] Li X X, Ono T, Wang Y L and Esashi M 2003 Appl. Phys. Lett. 83 3081
[4] Sundararajan S and Bhushan B 2002 Sensors and Actuators A 101 338
[5] Streitz F H, Cammarata R C and Sieradzki K 1994 Phys.Rev. B 49 10699
[6] Broughton J Q et al %, Meli C A, Vashishta P and Kalia K1997 Phys. Rev. B 56 611
[7] Villain P, Beauchamp P, Badwi K F, Goudeau P and Renault P -O 2004 Scripta Mater. 50 1247
[8] Rudd R E and Broughton J Q 2005 Phys. Rev. B 72 144104
[9] Sun C T and Zhang H 2003 J. Appl. Phys. 93 1212
[10] Guo J-G and Zhao Y-P 2005 J. Appl. Phys. 98074306
[11] Tromp R M, Hamers R J and Demuth J E 1985 Phys. Rev. Lett. 55 1303
[12] Ihara S, Ho S L, Uda T and Hirao M 1990 Phys. Rev. Lett. 65 1909
[13] Batra I P 1990 Phys. Rev. B 41 5048
[14] Keating P N 1966 Phys. Rev. 145 637
[15] R\"ucker H and Methfessel M 1995 Phys. Rev. B 52 11059
[16] Tang Z and Aluru N R 2006 Phys. Rev. B 74 235441
[17] Wortman J J and Evans R A 1965 J. Appl. Phys. 36 153
[18] Wolf D 1990 Surf. Sci. 225 117
[19] Zhou L G and Huang H 2004 Appl. Phys. Lett. 84 1940
[20] Wolf D 1991 Appl. Phys. Lett. 58 2081
[21] Sun C Q et al %, Tay B K, Zeng X T, Li S, Chen T P, Zhou J, Bai%H L and Jiang E Y2002 J. Phys.: Condens. Matter 14 7781 |
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