Double-Crystal x-Ray Diffraction Study on Ta/Al Multilayers

Chin. Phys. Lett.

1992, Vol. 9

Issue (11): 605-608 DOI:

Original Articles

Double-Crystal x-Ray Diffraction Study on Ta/Al Multilayers

XIU Lisong;YUAN Xiangyang;WU Ziqin;JIANG Shusheng*;HU An*;ZHAO Jiyong**;JIANG Jianhua**

Center for fundamental Physics , University of Science and Technology of China, Hefei 230026 *Laboratory of Microstructure Physics, Nanjing University, Nanjing 210080 **Institute of High Energy Physics, Academia Sinica, Beijing 100039

Cite this article:

XIU Lisong, YUAN Xiangyang, WU Ziqin et al 1992 Chin. Phys. Lett. 9 605-608

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Abstract Double-crystal x-ray diffraction has been used to measure the rocking curve of Ta/Al multilayers. The diffraction profiles of the multilayers are different. Besides the normal profile, two kinds of distorted profiles have been found. The simulations show that the deformed profiles of the peaks are caused by the imperfect periodicity (e.g. systematic period deviation and coexistence of two slightly different periods) in the multilayers.

Keywords: 68.65.+g 61.10.-i 68.55.-a

Published: 01 November 1992

PACS:	68.65.+g
	61.10.-i
	68.55.-a	(Thin film structure and morphology)

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https://cpl.iphy.ac.cn/ OR https://cpl.iphy.ac.cn/Y1992/V9/I11/0605

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	XIU Lisong
	YUAN Xiangyang
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	HU An
	ZHAO Jiyong
	JIANG Jianhua

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