Self-Consistent Kinetic Modeling of Electron Distribution Function in a Low-Pressure Inductively Coupled Plasma

Chin. Phys. Lett.

1996, Vol. 13

Issue (6): 447-450 DOI:

Original Articles

Self-Consistent Kinetic Modeling of Electron Distribution Function in a Low-Pressure Inductively Coupled Plasma

YANG Yun;WU Han-ming

Institute of Mechanics, Chinese Academy of Sciences, Beijing 100080

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YANG Yun, WU Han-ming 1996 Chin. Phys. Lett. 13 447-450

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Abstract Based upon the spatially inhomogeneous Boltzmann equation in two-term approximation coupled with electromagnetic and fluid model analysis for the recently developed inductively coupled plasma sources, a self-consistent electron kinetic model is developed. The electron distribution function, spatial distributions of the electron density and ionization rate are calculated and discussed.

Keywords: 52.25.Dg 52.50.Dg 52.65.-y

Published: 01 June 1996

PACS:	52.25.Dg	(Plasma kinetic equations)
	52.50.Dg	(Plasma sources)
	52.65.-y	(Plasma simulation)

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https://cpl.iphy.ac.cn/ OR https://cpl.iphy.ac.cn/Y1996/V13/I6/0447

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