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Uncooled Optically Readable Bimaterial Micro-Cantilever Infrared Imaging Device |
| DUAN Zhi-Hui1;ZHANG Qing-Chuan1;WU Xiao-Ping1;PAN Liang1;CHEN Da-Peng2;WANG Wei-Bing2;GUO Zhe-Ying1 |
| 1Key Laboratory of Mechanical Behavior and Design of
Materials, University of Science and Technology of China, Hefei 230027
2Microelectronics Research and Development Center, Chinese Academy of Sciences, Beijing 100029 |
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| Cite this article: |
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DUAN Zhi-Hui, ZHANG Qing-Chuan, WU Xiao-Ping et al 2003 Chin. Phys. Lett. 20 2130-2132 |
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Abstract We develop an uncooled infrared imaging device that contains a SiN-Au bimaterial micro-cantilever arrays detector and an optical read-out section. The detector converts the incident infrared radiation to the cantilever inclination angles, and the optical read-out section converts these angles directly to a visible image through an optical filtering operation to the spectra of the cantilever arrays with a knife-edge filter. The present results with the 140 x 98 cantilever arrays and the 8-bit A/D quantizer suggest that the objects at the temperature of 250°C at the distance as far as 1m can be detected and the noise-equivalent temperature difference (NETD) of the device is about 10 K. The further improvement of NETD is expected to approach about 14 mK with the optimized cantilever design and 12-bit quantizer.
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| Keywords:
07.57.Kp
07.10.Cm
42.30.Kq
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Published: 01 December 2003
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| PACS: |
07.57.Kp
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(Bolometers; infrared, submillimeter wave, microwave, and radiowave receivers and detectors)
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07.10.Cm
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(Micromechanical devices and systems)
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42.30.Kq
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(Fourier optics)
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