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Dynamics Behaviour of Nanoscale Electrostatic Actuators
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| LIN Wen-Hui;ZHAO Ya-Pu |
| State Key Laboratory of Nonlinear Mechanics, Institute of Mechanics, Chinese Academy of Sciences, Beijing 100080 |
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| Cite this article: |
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LIN Wen-Hui, ZHAO Ya-Pu 2003 Chin. Phys. Lett. 20 2070-2073 |
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Abstract The dynamics behaviour for nanoscale electrostatic actuators is studied. A two parameter mass-spring model is shown to exhibit a bifurcation from the case excluding an equilibrium point to the case including two equilibrium points as the geometrical dimensions of the device are altered. Stability analysis shows that one is a stable Hopf bifurcation point and the other is an unstable saddle point. In addition, we plot the diagram phases, which have periodical orbits around the Hopf point and a homoclinic orbit passing though the unstable saddle point.
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| Keywords:
85.85.+j
02.30.Oz
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Published: 01 November 2003
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| PACS: |
85.85.+j
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(Micro- and nano-electromechanical systems (MEMS/NEMS) and devices)
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02.30.Oz
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(Bifurcation theory)
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