| Original Articles |
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Compact Arrayed-Waveguide Grating on Silicon-on-Insulator with Integrated Waveguide Turning Mirrors |
| LI Guang-Bo1,2;GONG Zhao3;JIA Ke-Miao1,2;LONG Wen-Hua2;YANG Jian-Yi1,2;JIANG Xiao-Qing1;WANG Yue-Lin1,2,WANG Ming-Hua1 |
| 1Department of Information and Electronic Engineering and State Key Laboratory of Modern Optical Instrumentation, Zhejiang University, Hangzhou 310027
2State Key Laboratories of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050
3Zhejiang University City College, Hangzhou 310015 |
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| Cite this article: |
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LI Guang-Bo, GONG Zhao, JIA Ke-Miao et al 2005 Chin. Phys. Lett. 22 3100-3103 |
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Abstract A compact arrayed-waveguide grating (AWG) on the silicon-on-insulator material is designed and fabricated with employment of waveguide-integrated turning mirrors (WITMs). By properly setting the incident angle with the value of 45°, the effective area of the WITM AWG is only 1.15cm×1.15cm with the arrayed waveguide area of 0.6cm×0.6cm. The crosstalk of the fabricated 1×6 AWG is better than -19dB. The on-chip insertion loss is about -8.8dB and the output nonuniformity is less than 0.6dB. The polarization-dependent central wavelength shift is about 0.048nm and the polarization dependent loss is neglectable.
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| Keywords:
42.82.-m
42.25.Fx
42.70.Nq
42.79.Dj
42.79.Sz
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Published: 01 December 2005
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| PACS: |
42.82.-m
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(Integrated optics)
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42.25.Fx
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(Diffraction and scattering)
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42.70.Nq
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(Other nonlinear optical materials; photorefractive and semiconductor materials)
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42.79.Dj
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(Gratings)
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42.79.Sz
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(Optical communication systems, multiplexers, and demultiplexers?)
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