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Fabrication, Testing and Integration Technologies of Polymer Microlens for Pt/Si Schottky-Barrier Infrared Charge Coupled Device Applications |
| KE Cai-Jun1;YI Xin-Jian2;LAI Jian-Jun1;CHEN Si-Hai1 |
| 1Department of Optoelectronic Engineering, Huazhong University of Science and Technology, Wuhan 430074
2The State Laboratory for Image Processing and Intelligent Control, Huazhong University of Science and Technology, Wuhan 430074 |
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| Cite this article: |
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KE Cai-Jun, YI Xin-Jian, LAI Jian-Jun et al 2005 Chin. Phys. Lett. 22 135-138 |
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Abstract A novel polymer refractive microlens array has been formed on the surface of 256(V)×290(H) PtSi Schottky-barrier infrared charge coupled device (IRCCD) image sensors to improve the photoresponsivity of the IRCCD. The fabrication process flows of polymer microlens array are described. An effective aperture ratio in excess of 92% of microlens array has been achieved. An experimental facility to evaluate the optical performance of microlens array is introduced. The measurement results show that the microlens array indicates better than 4% non-uniformity of focal length and high optical performance. The application of the microlens array to improve the photosensitivity of infrared CCD is discussed.
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| Keywords:
42.82.Bq
42.79.-e
42.87.-d
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Published: 01 January 2005
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| PACS: |
42.82.Bq
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(Design and performance testing of integrated-optical systems)
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42.79.-e
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(Optical elements, devices, and systems)
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42.87.-d
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(Optical testing techniques)
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