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DEPTH PROFILING OF HYDROGEN IN SOLIDS BY ELASTIC RECOIL DETECTION WITH 19F IONS |
| LIU Jiarui;ZHU Peiran;FENG Aiguo;LI Dawan* |
| Institute of Physics, Academia Sinica, Beijing
*Department of Physics, Central Institute of Nationalities, Beijing |
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| Cite this article: |
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LIU Jiarui, ZHU Peiran, FENG Aiguo et al 1987 Chin. Phys. Lett. 4 249-252 |
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Abstract The hydrogen depth profiling in solids has been done by elastic recoil detection (ERD) technique with multicharged 19F ion beam from a small Tandem Accelerator of 2x1.7MV. Details of the experimental technique are described. The depth resolution of about 230Å in the near-surface regions (~5000Å)is much better than that of ERD technique with 2.5MeV He beam and heavy ion beam of 30MeV.
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Published: 01 June 1987
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