2011, Vol. 28(8): 87305-087305    DOI: 10.1088/0256-307X/28/8/087305
	Influence of Fluorine on the Conductivity and Oxidation of Silicon Nanomembranes after Hydrofluoric Acid Treatment
	ZHAO Xiang-Fu**, HAN Ping, ZHANG Rong, ZHENG You-Dou
	School of Electronic Science and Engineering, Jiangsu Provincial Key Laboratory of Advanced Photonic and Electronic Materials, National Laboratory of Solid State Microstructure, Nanjing University, Nanjing 210093
	收稿日期 2011-04-16  修回日期 1900-01-01
	Supporting info
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