2011, Vol. 28(7): 78102-078102    DOI: 10.1088/0256-307X/28/7/078102
	Fabrication of Hinged Mirrors Using a Strain-Driven Self-Assembly Method on a GaAs Substrate
	ZHOU Yan1, WANG Hai-Long1**, MA Chuan-He1,2, GONG Qian2, FENG Song-Lin2
	1 Shandong Provincial Key Laboratory of Laser Polarization and Information Technology, Department of Physics, Qufu Normal University, Qufu 273165 2 State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Micro-system and Information Technology, Chinese Academy of Sciences, Shanghai 200050
	收稿日期 2010-09-21  修回日期 1900-01-01
	Supporting info
	[1] Lin G, Pister K S J and Roos K P 1995 Sensors and Actuators A 46-47 233 [2] Prinz V Y, Chekhocskiy A V, Preobrazhenskii V V, Semyagin B R and Gutakocsky A K 2002 Nanotechnololy 13 231 [3] Vorob'ev A, Vaccaro P O, Kubota K, Aida T, Tokuda T, Hayashi T, Sahano Y, Ohta J and Nunoshita M 2003 J. Phys. D: Appl. Phys. 36 67 [4] Prinz V Y, Seleznev V A, Gutakosky A K, Chehovskiy A V, Preobrazhenskii V V, Putyato M A and Gavrilova T A 2000 Physica E 6 828 [5] Prinz V Y 2003 Microelectron. Engin. 69 466 [6] Arora W J, Nichol A J, Smith H I and Barbastathis G 2006 Appl. Phys. Lett. 88 053108 [7] Schumacher O, Mendach S, Welsch H, Schramm A, Heyn Ch and W Hansen 2005 Appl. Phys. Lett. 86 143109 [8] Nikishokov G P 2003 J. Appl. Phys. 94 5333 [9] Golod S V and Prinz V Y 2004 Appl. Phys. Lett . 84 3391 [10] Vaccaro P O, Kubota K and Aida T 2001 Appl. Phys. Lett. 78 2852 [11] Nikishokov G P, Nishidate Y, Ohnish T and Vaccaro P O 2006 Nanotechnology 17 1128 [12] Nikishkov G P, Khmyrova I and Ryzhii V 2003 Nanotechnology 14 820