2011, Vol. 28(7): 76102-076102    DOI: 10.1088/0256-307X/28/7/076102
	Theoretical Hardness of Zr3N4 Films
	GAO Fa-Ming
	1 Key Laboratory of Applied Chemistry, Yanshan University, Qinhuangdao 066004 2 Steacie Institute for Molecular Sciences, National Research Council of Canada, Ottawa, K1A 0R6, Canada
	收稿日期 2010-10-09  修回日期 1900-01-01
	Supporting info
	[1] McKenzie D R 1993 J. Vac. Sci. Technol. B 11 1928 [2] McKenzie D R, Muller D and Pailthorpe B A 1991 Phys. Rev. Lett. 67 773 [3] Sharda T, Soga T, Jimbo T and Umeno M 2001 Diamond Relat. Mater. 10 352 [4] Manish Chhowalla H and Emrah Unalan 2005 Nature Mater. 4 317 [5] Novikov N V and Dub S N 1996 Diamond Relat. Mater. 5 1026 [6] Gao F M, He J L, Wu E D, Liu S M, Yu D L, Li D C, Zhang S Y and Tian Y J 2003 Phys. Rev. Lett. 91 015502 [7] Gao F M, Xu R and Liu K 2005 Phys. Rev. B 71 052103 [8] Gao F M 2004 Phys. Rev. B 69 094113 [9] Gao F M, Hou L, He Y H 2004 J. Phys. Chem. B 108 13069 [10] Lerch M, Fuglein E and Wrba J 1996 Z. Anorg. Allg. Chem. 622 367 [11] Zerr A, Miehe G and Riedel R 2003 Nature Mater. 2 185 [12] Kresse G and Furthmuller J 1996 Comput. Mater. Sci. 6 15 [13] Kresse G and Furthmuller J 1996 Phys. Rev. B 54 11169 [14] Vanderbilt D 1990 Phys. Rev. B 41 7892 [15] Perdew J P, Burke K and Ernzerhof M 1996 Phys. Rev. B 77 3865 [16] Le Page Y and Rodgers J R 2005 J. Appl. Cryst. 38 697 [17] Ching W Y, Xu Y N and Ouyang L 2002 Phys. Rev. B 66 235106 [18] Kroll P 2003 Phys. Rev. Lett. 90 125501 [19] Born M and Huang K 1954 Dynamical Theory of Crystal Lattices (London: Oxford University) [20] Sattel S, Robertson J, Scheib M and Ehrhardt H 1996 Appl. Phys. Lett. 69 497 [21] Zhang S Y 1990 Chin. J. Chem. Phys. 4 109 (in Chinese) [22] Gao F M and Gao L H 2010 J. Superhard Mater. 32 148