2011, Vol. 28(2): 27301-027301    DOI: 10.1088/0256-307X/28/2/027301
Properties of Si Doped Al0.4Ga0.6N Epilayers with Different AlGaN Window Layer Grown on High Quality AlN Buffer by MOCVD
YU Chen-Hui1,2, LIU Cheng1, HAN Xiang-Yun1, KANG Wei1, FANG Yan-Yan1, DAI Jiang-Nan1,2, WU Zhi-Hao1, CHEN Chang-Qing1**
1Wuhan National Laboratory for Optoelectronics, College of Optoelectronic Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074
2National Laboratory for Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083
收稿日期 2010-11-08  修回日期 1900-01-01
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