2011, Vol. 28(1): 16102-016102    DOI: 10.1088/0256-307X/28/1/016102
	Ion-implanted Mechanism of the Deposition Process for Diamond-Like Carbon Films
	WANG Xue-Min1, WU Wei-Dong1**, WANG Yu-Ying1, WANG Hai-Ping1, GE Fang-Fang1, TANG Yong-Jian1, JU Xin2
	1Research Center of Laser Fusion, China Academy of Engineering Physics, Mianyang 621900 2Department of Physics, University of Science and Technology Beijing, Beijing 100083
	收稿日期 2010-11-05  修回日期 1900-01-01
	Supporting info
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