2010, Vol. 27(12): 127302-127302    DOI: 10.1088/0256-307X/27/12/127302
	Influence of O2 Flux on Compositions and Properties of ITO Films Deposited at Room Temperature by Direct-Current Pulse Magnetron Sputtering
	WANG Hua-Lin, DING Wan-Yu, LIU Chao-Qian, CHAI Wei-Ping
	School of Materials Science and Engineering, Dalian Jiaotong University, Dalian 116028 Engineering Research Center of Optoelectronic Materials and Devices, Education Department of Liaoning Province, Dalian 116028
	收稿日期 2010-09-02  修回日期 1900-01-01
	Supporting info
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