2008, Vol. 25(6): 2144-2146    DOI:
Improvement of Uniformity of Inductively Coupled Plasma with a one Spiral Antenna
LI Lin-Sen, XU Xu, LIU Feng, ZHOU Qian-Hong, NIE Zong-Fu, LIANG Yi-Zi,
LIANG Rong-Qing
Institute of Modern Physics, Fudan University, Shanghai 200433
收稿日期 2007-12-19  修回日期 1900-01-01
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