2008, Vol. 25(6): 2144-2146 DOI: | ||
Improvement of Uniformity of Inductively Coupled Plasma with a one Spiral Antenna | ||
LI Lin-Sen, XU Xu, LIU Feng, ZHOU Qian-Hong, NIE Zong-Fu, LIANG Yi-Zi, LIANG Rong-Qing |
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Institute of Modern Physics, Fudan University, Shanghai 200433 | ||
收稿日期 2007-12-19 修回日期 1900-01-01 | ||
Supporting info | ||
[1] Bluem E, Bechu S, Boisse-Laporte C, Leprince P and Marec J 1995 [2] Sauve G, Moisan M and Zakrzewski A 1993 J. Microwave Power [3] Werner F, Korzec D and Engelmann J 1994 Plasma Sources Sci. [4] Liang R Q, Ou Q R and Liang B 2006 Jpn. J. Appl. Phys. II [5] Sugai H, Ghanashev I and Nagatsu M 1998 Plasma Sources Sci. [6] Osiac M, Heil B and Gans T 2007 Plasma Sources Sci. [7] Rui H, Xuan L and Yun Y 1998 Chin. Phys. Lett. 21 1168 |
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