2008, Vol. 25(6): 2265-2268 DOI: | ||
Three-Step Growth Optimization of AlN Epilayers by MOCVD | ||
PENG Ming-Zeng, GUO Li-Wei, ZHANG Jie, YU Nai-Sen, ZHU Xue-Liang, YAN Jian-Feng, GE Bin-Hui, JIA Hai-Qiang, CHEN Hong,ZHOU Jun-Ming |
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Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, PO Box 603, Beijing 100080 | ||
收稿日期 2007-10-24 修回日期 1900-01-01 | ||
Supporting info | ||
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