2009, Vol. 26(4): 48104-048104 DOI: 10.1088/0256-307X/26/4/048104 | ||
Fabrication and Frequency Response Characteristics of AlN-Based Solidly Mounted Resonator | ||
XIONG Juan, GU Hao-Shuang, HU Kuan, HU Ming-Zhe | ||
Department of Physics and Electronic Technology, Key Laboratory of Ferroelectric and Piezoelectric Materials and Devices of Hubei Province, Hubei University, Wuhan 430062 | ||
收稿日期 2008-12-25 修回日期 1900-01-01 | ||
Supporting info | ||
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