2009, Vol. 26(9): 94203-094203    DOI: 10.1088/0256-307X/26/9/094203
Fabrication of 3D Templates Using a Large Depth of Focus Femtosecond Laser
LI Xiao-Fan1,3, WINFIELD Richard2, O'BRIEN Shane2, CHEN Liang-Yao1
1Department of Optical Science and Engineering, Fudan University, Shanghai 2004332Tyndall National Institute, Lee Maltings, Prospect Row, Cork, Ireland3Department of Microelectronic Engineering, University College Cork, Cork, Ireland
收稿日期 2009-03-05  修回日期 1900-01-01
Supporting info

[1] Lee K S, Kima R H, Yang D Y and Park S H 2008 Prog.
Polym. Sci. 33 631

[2] Maruo S, Nakamura O and Kawata S 1997 Opt. Lett.
22 132

[3] Kawata S, Sun H B, Tanaka T and Takada K 2001 Nature
412 697

[4] Houbertz R 2005 Appl. Surf. Sci. 247 504

[5] Bhuian B, Winfield R J, O'Brien S and Crean G M 2006
Appl. Surf. Sci. 252 4845

[6] Winfield R J, Bhuian B, O'Brien S and Crean G M 2007
Appl. Phys. Lett. 90 111115

[7] Li X F, Winfield R J, O'Brien S and Crean G M 2009
Appl. Surf. Sci. 255 5146

[8] Schilling A, Nussbaum P, Philipoussis I, Herzig H P,
Stauffer L, Rossi M and Kley E B 2000 Proc. SPIE 4179 65

[9] Cunningham L P, Veilleux M P and Campagnola P J 2006
Opt. Express 14 8613

[10] Pham A T, Kim D P, Lim T W, Park S H, Yang D Y and Lee K
S 2006 Adv. Funct. Mater. 16 1235