2010, Vol. 27(1): 17501-017501    DOI: 10.1088/0256-307X/27/1/017501
Effect of Sputtering Parameters on Film Composition, Crystal Structure, and Coercivity of SmCo Based Films Deposited on Si (100) Substrates
XUE Gang, PENG Long, ZHANG Huai-Wu
State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054
收稿日期 2009-08-05  修回日期 1900-01-01
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