2010, Vol. 27(2): 28401-028401    DOI: 10.1088/0256-307X/27/2/028401
	Nanoscale Tapered Pt Bottom Electrode Fabricated by FIB for Low Power and Highly Stable Operations of Phase Change Memory
	LV Shi-Long1, SONG Zhi-Tang1, LIU Yan1,2, FENG Song-Lin1
	1State Key Laboratory of Functional Materials for Informatics, Laboratory of Nanotechnology, Shanghai Institute of Micro-system and Information Technology, Chinese Academy of Sciences, Shanghai 2000502Graduate School of the Chinese Academy of Sciences, Beijing 100049
	收稿日期 2009-10-26  修回日期 1900-01-01
	Supporting info
	[1] Tseng A A 2005 Small 10 924 [2] Karre P S K, Bergstrom P L, Mallick G and Karna S P J 2007 Appl. Phys. 102 024316 [3] Wagner A, Levin J P, Mauer J L, Blauner P G, Kirch S J and Longo P 1990 J. Vac. Sci. Technol. B 8 1557 [4] Ebbesen T W, Lezec H J, Hiura H, Bennett J W, Ghaemi H F and Thio T 1996 Nature 382 54 [5] Hudgens S and Johnson B 2004 Mater. Res. Soc. Bull. 29 829 [6] Lay S 2003 Tech. Dig. Int. Electron Devices Meet (Washington DC 2--5 December 2001) p 255 [7] Hwang Y N, Lee S H, Ahn S J, Lee S Y, Ryoo K C, Hong H S, Koo H C, Yeung F, Oh J H, Kim H J, Jeong W C, Park J H, Horii H, Ha Y H, Yi J H, Koh G H, Jeong G T, Jeong H S and Kinam K 2003 Tech. Dig. Int. Electron Devices Meet (Washington DC 8--10 December 2003) p 893 [8] Oh J H, Park J H, Lim Y S, Lim H S, Oh Y T, Kim J S, Shin J M, Song Y J, Ryoo K C, Lim D W, Park S S, Kim J I, Kim J H, Yu J, Yeung F, Jeong C W, Kong J H, Kang D H, Koh G H, Jeong G T, Jeong H S and Kinam K 2006 Tech. Dig. Int. Electron Devices Meet (Tokyo 11--13 December 2006) p 2.6 [9] Lai S and Lowrey T 2001 Tech. Dig. Int. Electron Devices Meet p 803 [10] Pirovano A, Lacaita A L, Benvenuti A, Pellizzer F, Hudgens S and Bez R 2003 Tech. Dig. Int. Electron Devices Meet p 699 [11] Ovshinsky S R 1968 Phys. Rev. Lett. 21 1450 [12] Chen Y C, Chen H P, Liao Y Y, Lin H T, Chou L H, Kuo J S, Chen P H, Lung S L and Liu R 2003 LSI Symp. Tech. Dig p 32 [13] Xu C, Song Z T, Liu B, Feng S L and Chen B 2008 Appl. Phys. Lett. 92 062103 [14] Kang D H, Ahn D H, Kim K B, Webb J F and Yi K W 2003 J. Appl. Phys. 94 3536 [15] Go M S H 2001 MS thesis (Delft University of Technology) [16] Melngailis J and Blauner P G 1989 Mater. Res. Soc. Symp. Proc. 147 127 [17] Jeong C W, Kang D H, Ha D W, Song Y J, Oh J H, Kong J H, Yoo J H, Park J H, Ryoo K C, Lim D W, Park S S, Kim J I, Oh Y T, Kim J S, Shin J M, Park J, Fai Y, Kim Y T, Koh G H, Jeong G T, Jeong H S and Kim K 2007 ICMTD (Paris 7--10 May 2007)